Chemical mechanical planarization in IC device manufacturing III editors, R. L. Opila, Iqbal Ali, Y. A. Arimoto, Y. Homma, C. Reidsema-Simpson, K. B. Sundaram

Text Registration

Chemical mechanical planarization in IC device manufacturing III editors, R. L. Opila, Iqbal Ali, Y. A. Arimoto, Y. Homma, C. Reidsema-Simpson, K. B. Sundaram

Status

Published

on 14 Jun 2007

Year of Creation

2000

Electrochemical Society, Inc. (employer for hire)

Registration Number

TX0005208067

on 14 Jun 2007

The U.S. Copyright record (Registration Number: TX0005208067) dated 14 Jun 2007, pertains to an electronic file (eService) titled "Chemical mechanical planarization in IC device manufacturing III editors, R. L. Opila, Iqbal Ali, Y. A. Arimoto, Y. Homma, C. Reidsema-Simpson, K. B. Sundaram" created in 2000. The copyright holder is Electrochemical Society, Inc. (employer for hire), known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Electrochemical Society, Inc. (employer for hire).

Electrochemical Society, Inc. (employer for hire)

Application Details

Registration Number

TX0005208067

Registration Date

6/14/2007

Year of Creation

2000

Place of First Publication

Pennington, NJ

Publisher Name

Electrochemical Society

Agency Marc Code

DLC-CO

Record Status

New

Corporate Author

Electrochemical Society, Inc

Physical Description

644 p

Series Statement

Electrochemical Society proceedings vol. 99-37

Personal Authors

Corporate Authors

Inc Electrochemical Society

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