Implementation and Evaluation of Optical and Stylus Based Profiling Techniques for Surface Metrology

Text Registration

Implementation and Evaluation of Optical and Stylus Based Profiling Techniques for Surface Metrology

Status

Published

on 26 May 2021

Year of Creation

2021

Kumar Arumugam

Registration Number

TX0008978781

on 26 May 2021

The U.S. Copyright record (Registration Number: TX0008978781) dated 26 May 2021, pertains to an electronic file (eService) titled "Implementation and Evaluation of Optical and Stylus Based Profiling Techniques for Surface Metrology" created in 2021. The copyright holder is Kumar Arumugam, known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Kumar Arumugam.

Kumar Arumugam

Application Details

Registration Number

TX0008978781

Registration Date

5/26/2021

Year of Creation

2021

Agency Marc Code

DLC-CO

Record Status

New

Physical Description

Electronic file (eService)

First Publication Nation

United States

Personal Authors

Kumar Arumugam

Notes

Rights Note: Mark Dill, ProQuest, LLC, 789 E. Eisenhower Parkway, Ann Arbor, MI, 48108-3218, United States, (800) 521-0600, disspub@proquest.com

Statements

Application Title Statement: Implementation and Evaluation of Optical and Stylus Based Profiling Techniques for Surface Metrology

Author Statement: Kumar Arumugam Citizenship: not known Authorship: text

Notes

Rights Note: Mark Dill, ProQuest, LLC, 789 E. Eisenhower Parkway, Ann Arbor, MI, 48108-3218, United States, (800) 521-0600, disspub@proquest.com

Statements

Application Title Statement: Implementation and Evaluation of Optical and Stylus Based Profiling Techniques for Surface Metrology

Author Statement: Kumar Arumugam Citizenship: not known Authorship: text

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