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Visit USCOIn-line characterization techniques for performance and yield enhancement in microelectronic manufacturing, 1-2 October 1997, Austin, Texas Damon K. DeBusk, Sergio Ajuria, chairs/editors
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Copyright Title
In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing, 1-2 October 1997, Austin, Texas Damon K. DeBusk, Sergio Ajuria, chairs/editors
Status
Published
on 14 Jun 2007
Year of Creation
1996
Copyright Claimant
Society of Photo-Optical Instrumentation Engineers (employer for hire)
Registration Number
TX0004718450
on 14 Jun 2007Copyright Summary
The U.S. Copyright record (Registration Number: TX0004718450) dated 14 Jun 2007, pertains to an electronic file (eService) titled "In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing, 1-2 October 1997, Austin, Texas Damon K. DeBusk, Sergio Ajuria, chairs/editors" created in 1996. The copyright holder is Society of Photo-Optical Instrumentation Engineers (employer for hire), known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Society of Photo-Optical Instrumentation Engineers (employer for hire).
Copyright Details
Copyright Claimant
Society of Photo-Optical Instrumentation Engineers (employer for hire)
Application Details
Registration Number
TX0004718450
Registration Date
6/14/2007
Year of Creation
1996
Place of First Publication
Bellingham, WA
Publisher Name
International Society for Optical Engineering
Agency Marc Code
DLC-CO
Record Status
New
Corporate Author
Society of Photo-Optical Instrumentation Engineers
Physical Description
186 p
Series Statement
SPIE proceedings series vol. 3215
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