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Visit USCOEmerging lithographic technologies III 15-17 March 1999, Santa Clara, California Yuli Vladimirsky, chair/editor
Text Registration
Copyright Title
Emerging lithographic technologies III 15-17 March 1999, Santa Clara, California Yuli Vladimirsky, chair/editor
Status
Published
on 14 Jun 2007
Year of Creation
1999
Copyright Claimant
Society of Photo-Optical Instrumentation Engineers (employer for hire)
Registration Number
TX0004465806
on 14 Jun 2007Copyright Summary
The U.S. Copyright record (Registration Number: TX0004465806) dated 14 Jun 2007, pertains to an electronic file (eService) titled "Emerging lithographic technologies III 15-17 March 1999, Santa Clara, California Yuli Vladimirsky, chair/editor" created in 1999. The copyright holder is Society of Photo-Optical Instrumentation Engineers (employer for hire), known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Society of Photo-Optical Instrumentation Engineers (employer for hire).
Copyright Details
Copyright Claimant
Society of Photo-Optical Instrumentation Engineers (employer for hire)
Application Details
Registration Number
TX0004465806
Registration Date
6/14/2007
Year of Creation
1999
Place of First Publication
Bellingham, WA
Publisher Name
SPIE
Agency Marc Code
DLC-CO
Record Status
New
Corporate Author
Society of Photo-Optical Instrumentation Engineers
Physical Description
2 v
Series Statement
SPIE proceedings series vol. 3676
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