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Visit USCOAdvances in mirror technology for x-ray, EUV lithography, laser, and other applications 7-8 August 2003, San Diego, California, USA Ali M. Khounsary, Udo Dinger, Kazuya Ota, chairs/editors
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Copyright Title
Advances in mirror technology for x-ray, EUV lithography, laser, and other applications 7-8 August 2003, San Diego, California, USA Ali M. Khounsary, Udo Dinger, Kazuya Ota, chairs/editors
Status
Published
on 15 Jun 2007
Year of Creation
2003
Copyright Claimant
Society of Photo-Optical Instrumentation Engineers (employer for hire)
Registration Number
TX0005969870
on 15 Jun 2007Copyright Summary
The U.S. Copyright record (Registration Number: TX0005969870) dated 15 Jun 2007, pertains to an electronic file (eService) titled "Advances in mirror technology for x-ray, EUV lithography, laser, and other applications 7-8 August 2003, San Diego, California, USA Ali M. Khounsary, Udo Dinger, Kazuya Ota, chairs/editors" created in 2003. The copyright holder is Society of Photo-Optical Instrumentation Engineers (employer for hire), known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Society of Photo-Optical Instrumentation Engineers (employer for hire).
Copyright Details
Copyright Claimant
Society of Photo-Optical Instrumentation Engineers (employer for hire)
Application Details
Registration Number
TX0005969870
Registration Date
6/15/2007
Year of Creation
2003
Place of First Publication
Bellingham, WA
Publisher Name
SPIE
Agency Marc Code
DLC-CO
Record Status
New
Corporate Author
Society of Photo-Optical Instrumentation Engineers
Physical Description
222 p
Series Statement
SPIE proceedings series vol. 5193
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