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Visit USCOExtreme Ultraviolet (EUV) Lithography [Published: 2010-03-03. Issue: vol. 7636, no. 1 & 2, 22-25 February 2010]
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Serial Registration
Copyright Title
Extreme Ultraviolet (EUV) Lithography [Published: 2010-03-03. Issue: vol. 7636, no. 1 & 2, 22-25 February 2010]
Status
Published
on 12 Jul 2010
Year of Creation
2010
Copyright Claimant
SPIE
Registration Number
TX0007198705
on 12 Jul 2010Copyright Summary
The U.S. Copyright record (Registration Number: TX0007198705) dated 12 Jul 2010, pertains to an electronic file (eService) titled "Extreme Ultraviolet (EUV) Lithography [Published: 2010-03-03. Issue: vol. 7636, no. 1 & 2, 22-25 February 2010]" created in 2010. The copyright holder is SPIE, known for their creative contributions in serial registration. For any inquiries concerning this copyrighted material, kindly reach out to SPIE.
Application Details
Registration Number
TX0007198705
Registration Date
7/12/2010
Year of Creation
2010
Agency Marc Code
DLC-CO
Record Status
New
Corporate Author
SPIE
First Publication Nation
United States
ISBN
9780819480507
Notes
Rights Note: SPIE, PO Box 10, Bellingham, WA, 98227-0010, United States, (360) 676-3290
Copyright Local Holdings: vol. 7636, no. 1 & 2, 22-25 February 2010 ISBN 9780819480507 Created 2010 Pub. 2010-03-03 Reg. 2010-07-21 TX0007198705 STEK
Statements
Application Title Statement: Extreme Ultraviolet (EUV) Lithography
Author Statement: SPIE employer for hire Domicile: United States Citizenship: United States Authorship: collective work which may include text, editing, compilation, and contribution(s) in which copyright has been transferred to the claimant
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