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Visit USCOProceedings of SPIE- Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019 [Published: 2019-06-17. Issue: vol. 10958, 25-28 February 2019]
Serial Registration
Copyright Title
Proceedings of SPIE- Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019 [Published: 2019-06-17. Issue: vol. 10958, 25-28 February 2019]
Status
Published
on 23 Aug 2019
Year of Creation
2019
Copyright Claimant
SPIE
Registration Number
TX0008786763
on 23 Aug 2019Copyright Summary
The U.S. Copyright record (Registration Number: TX0008786763) dated 23 Aug 2019, pertains to an electronic file (eService) titled "Proceedings of SPIE- Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019 [Published: 2019-06-17. Issue: vol. 10958, 25-28 February 2019]" created in 2019. The copyright holder is SPIE, known for their creative contributions in serial registration. For any inquiries concerning this copyrighted material, kindly reach out to SPIE.
Application Details
Registration Number
TX0008786763
Registration Date
8/23/2019
Year of Creation
2019
Agency Marc Code
DLC-CO
Record Status
New
Corporate Author
SPIE
Physical Description
Electronic file (eService)
First Publication Nation
United States
ISSN
0277-786X
Notes
Rights Note: SPIE, PO Box 10, Bellingham, WA, 98227-0010, United States
Copyright Local Holdings: vol. 10958, 25-28 February 2019 Created 2019 Pub. 2019-06-17 Reg. 2019-08-23 TX0008786763 SMARTIN
Statements
Application Title Statement: Proceedings of SPIE- Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019
Author Statement: SPIE employer for hire Domicile: United States Citizenship: United States Authorship: Collective Work Authorship and Component Work(s) authored or fully owned by the Collective Work Author
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