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Visit USCOProceedings of SPIE- Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV [Published: 2021-04-15. Issue: vol. 11611, 22-26 February 2021]
Serial Registration
Copyright Title
Proceedings of SPIE- Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV [Published: 2021-04-15. Issue: vol. 11611, 22-26 February 2021]
Status
Published
on 27 Apr 2021
Year of Creation
2021
Copyright Claimant
SPIE
Registration Number
TX0008966707
on 27 Apr 2021Copyright Summary
The U.S. Copyright record (Registration Number: TX0008966707) dated 27 Apr 2021, pertains to an electronic file (eService) titled "Proceedings of SPIE- Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV [Published: 2021-04-15. Issue: vol. 11611, 22-26 February 2021]" created in 2021. The copyright holder is SPIE, known for their creative contributions in serial registration. For any inquiries concerning this copyrighted material, kindly reach out to SPIE.
Application Details
Registration Number
TX0008966707
Registration Date
4/27/2021
Year of Creation
2021
Agency Marc Code
DLC-CO
Record Status
New
Corporate Author
SPIE
First Publication Nation
United States
ISSN
0277-786X
Notes
Rights Note: SPIE, PO Box 10, Bellingham, WA, 98227-0010, United States
Copyright Local Holdings: vol. 11611, 22-26 February 2021 Created 2021 Pub. 2021-04-15 Reg. 2021-04-27 TX0008966707 MWEARING
Statements
Application Title Statement: Proceedings of SPIE- Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
Author Statement: SPIE employer for hire Domicile: United States Citizenship: United States Authorship: Collective Work Authorship and Component Work(s) authored or fully owned by the Collective Work Author
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